发明名称 Secondary pumping group
摘要 The assembly, associated with a secondary mechanical pump (1), has a cryogenic trap (2) in the form of a ring surrounding the suction side of the pump. The trap is enclosed in a housing (4) forming the pump's suction port. It has a U-shaped cross-section with its open side towards the pump's suction side. The trap is cooled by a pulsed-tube cryogenerator (9) which surrounds the pump beneath the trap and is fed by a compressor (11) through an impedance (12) and an exchanger-regenerator (14). The impedance is in the form of a rotary valve (12) driven by a motor (13), with the exchanger-regenerator, the valve and the motor aligned parallel with the axis of the pump and beneath the cold end of the pulsed tube. The assembly is connected to a chamber in which an industrial process takes place, and a neutral gas is injected into the pump and its flow is regulated according to the pressure in the chamber.
申请公布号 EP0767307(A1) 申请公布日期 1997.04.09
申请号 EP19960402094 申请日期 1996.10.01
申请人 ALCATEL CIT 发明人 GORINAS, GUY;MATHES, RAINER;RAVEX, ALAIN;PONCET, JEAN-MARC
分类号 F04B37/06;F04B37/08;F04B41/06;F04D19/04;F16T1/36 主分类号 F04B37/06
代理机构 代理人
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