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发明名称
FORMING METHOD OF OXIDE FILM AND SEMICONDUCTOR DEVICE PROVIDED THEREWITH
摘要
申请公布号
JPH0997790(A)
申请公布日期
1997.04.08
申请号
JP19950253876
申请日期
1995.09.29
申请人
SANYO ELECTRIC CO LTD
发明人
TOJO JUNICHIRO
分类号
H01L21/76;H01L21/321;H01L21/60;(IPC1-7):H01L21/321
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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