| 摘要 |
PROBLEM TO BE SOLVED: To mass-produce a gas sensor, by letting a part of area of a ceramic gas selection permeation film having fine holes controlled to have a specific diameter hold an oxidation catalyst, forming a pair of electrodes on areas of the film where the oxidation catalyst and not held respectively, and further laminating an oxygen ion conductor layer, a ceramic insulator layer and a resistance heater film layer sequentially. SOLUTION: A gas selection permeation film 1 of ceramics, e.g. alumina, cordierite or the like is obtained by burying a ceramic thin film in minute holes according to a sol-gel method, CVD method, etc., controlling the diameter of the minute holes to 3-100Å, and an oxidation catalyst such as palladium, rhodium or the like is held in the minute holes of a partial area 2 by a CVD method, dipping method, etc. A pair of platinum electrodes 3 are formed in the area 2 and the other area by an electron beam vapor deposition method, ion-plating method, etc. Further, an oxygen ion conductor layer 4 of yttrium- stabilized zirconium, a ceramic insulator body 5 of alumina and a resistance heater film layer 6 of a platinum resistance film and sequentially formed. Accordingly, the highly sensitive and compact sensor, which can be mass-produced, is obtained. |
