| 摘要 |
An actuator is made from a piezoelectric ceramic substrate and an alumina ceramic substrate. The alumina ceramic substrate is made from a material with a dielectric constant that is lower than the piezoelectric material from which the piezoelectric ceramic substrate is made. Using a diamond cutter blade, the actuator is formed with channel groove portions cut in the piezoelectric ceramic substrate, and sloping groove portions and shallow groove portions cut in the alumina ceramic substrate. Metal electrodes are vapor deposited at the inner surface of the shallow groove portions, on the side walls and a portion of the floor of the sloping groove portions, and on the side walls of the channel groove portions. Ink is ejected by deforming the side walls at the channel groove portions, which are made the piezoelectric ceramic substrate. Because the capacitance of the sloping groove portions and the shallow groove portions is small, only a small amount of energy need be inputted to eject ink droplets.
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