| 摘要 |
PROBLEM TO BE SOLVED: To efficiently form electrodes of sufficient thickness in a short operating time at the sidewall for partitioning an ink channel made of a piezoelectric material. SOLUTION: This method for manufacturing an ink jet head comprises the steps of alternately vacuum depositing nickel on the sidewall 12 of an ink channel 11 made of a piezoelectric material from obliquely above at the right and left sides, and forming first metal thin film layer (deposited film) 13a on the upper half of the sidewall 12. The method further comprises the steps of polishing the excess deposited film of the upper end of the sidewall 12 to remove it, then picking the nickel deposited film to activate it, then electrolessly plating by nickel-phosphorus alloy (Ni-P), and forming a second metal thin film layer (plated film) 13b on the deposited film. Thus, the electrode of a two-layer structure having a thickness of 1μm or more is formed in a short time.
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