MAGNETIC THIN FILM FOR MAGNETIC HEAD, ITS MANUFACTURING METHOD, AND MAGNETIC HEAD USING THE THIN FILM

摘要

PROBLEM TO BE SOLVED: To enhance the permeability in the whole region from low- to high-frequency region by a method wherein an iron containing nitrogen in a state that it produces no compound at all is formed so as to form a Sendust film having (111) face orientation on the iron film. SOLUTION: An iron film 2 formed in nitrogen atmospheric plasma, a Sendust film formed in vacuum and an SiO2 film as a protective film are laminated on a ceramic substrate 1 as a film formed material. Next, the substrate 1 made of different material is set in an evaporator to evaporate the iron film 2 as an underneath film. Next, after the exaustion at the pressure not exceeding 2×10<-6> Torr to remove nitrogen gas, a crucible is replaced to form the Sendust film 3 in the iron film 2 by electron beam evaporation. The main orientational direction of the Sendust film 3 having no underneath film is (220) but that of the Sendust film formed on the Fe underneath film is (111) thereby enabling the frequency characteristics of the permeability extending over the regions from low to high-frequency to be enhanced.