发明名称 ILLUMINATING OPTICAL SYSTEM AND LIGHT SOURCE DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To supply an illuminating luminous flux without irregularity and with high intensity to an object to be observed by constituting a light source unit so that a shade luminous flux may be made incident obliquely to the optical axis of a succeeding illuminating system or an optical fiber being an input means to the succeeding illuminating system. SOLUTION: A halogen lamp unit is inclined at the angle ofθwith center at the second focal point 4 of an elliptical condensing reflection mirror 2 being a condensing position. The condensing position 4 arranged on the optical axis of the illuminating optical system of an optical microscope system constituted of lenses 5 to 7, and the angleθis set as an angle at which the shade luminous flux 13 of a halogen electrode 3 out of the condensed luminous flux from the mirror 2 is vignetted by a field stop 6 to be positioned on the outside of the luminous flux illuminating the observed area of the object 10. Therefore, the shade luminous flux generated by the vignetting of the light source itself of the electrode 3, etc., is guided to the outside of the effective area of the illuminating light used by the illuminating optical system, so that illuminance on the entire area can be kept high and uniform, and excellent microscopic observation is realized.</p>
申请公布号 JPH0996763(A) 申请公布日期 1997.04.08
申请号 JP19950278365 申请日期 1995.10.02
申请人 CANON INC 发明人 MORI TETSUYA;SHIMA SHINICHI
分类号 G02B19/00;F21V7/08;F21V8/00;G02B21/06;G03F7/20;H01L21/027;(IPC1-7):G02B19/00 主分类号 G02B19/00
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