| 摘要 |
PROBLEM TO BE SOLVED: To provide a reliable and safe sensor chip which can electrically measure its sensing characteristic for acceleration during manufacturing process of the sensor chip, which is inexpensive and characteristically uniform, and which can electrically detect the presence of a failure even after the installation. SOLUTION: A sensor chip 1 which is fixed to a lead frame 4 through the intermediary of insulating resin 5, is fixed to a resin case 6 which is then fixed to a resin cap 7. In a silicon chip 1, a superposing part 19, a support part 20 and a thin wall beam part 21 are formed in a silicon substrate 30, and a plurality of piezoresistors 14 are formed in the beam part 21. A.C. voltage is applied to between the superposing part 19 and the lead frame 4. |
