| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent an insulator material component from diffusing into a dielectric layer in case of firing surely by forming a barrier layer of a refractory of a specific metal oxide, for suppressing the diffusion of a glass component between capacitor electrodes and a glass ceramic insulating layer. SOLUTION: On the occasion of manufacturing a glass ceramic multilayer interconnection board with built-in capacitor, electrodes 21 and a dielectric layer 22, and barrier layers 4 and via-conductors 3 of a capacitor 2, furthermore according to need a desired wiring pattern are formed beforehand in a plurality of glass ceramic green sheets constituting insulating layer 1, and then those glass ceramic green sheets are laminated and fired. As the barrier layers 4, one kind of powder or more chosen from refractory powders of alumina, magnesia, zirconia, titania, calcia are used. To that powder a binder for example is mixed and kneaded to make paste, and a barrier layer is formed by printing between the capacitor electrodes and the insulating layer.</p> |
