| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor beam which is high heat-resistant and which can be small-sized, by inwardly bending a flexible film of an element composed of a metal plate, a ceramic group piezoelectric member having electrodes at opposite surfaces and the flexible film which are laminated with each other. SOLUTION: A metal plate 1 for supporting the structure of a beam body serves as a terminal for detecting an electromotive force of a piezoelectric element 3 having at its opposite surfaces electrodes 2a, 2b which are metallized with conductive ink, and stuck to the metal plate 1 by an adhesive 4. At this time the electrode 2b is pressed so as be sufficiently electrically conductive to the metal plate 1. An insulating layer 5 is formed over the electrode 2a from a flexible film, and is inwardly bent along line A-A'. With this arrangement, the insulating layer 5 can prevent the ceramic material of the element from scattering even though it is broken, and further, it can prevent the electrode 2a from scattering so as to maintain the electrical conductivity. Thereby it is possible to provide a sensor beam which is small-sized and is high heat- resistant. |
