发明名称 A COMPOUND PLASMA CONFIGURATION, AND METHOD AND APPARATUS FOR GENERATING A COMPOUND PLASMA CONFIGURATION
摘要 <p>A compound plasma configuration can be formed from a device having pins (116), and an annular electrode (111) surrounding the pins (116). A cylindrical conductor (110) is electrically connected to , and coaxial with, the annular electrode (111), and a helical conductor (118) coaxial with the cylindrical conductor. The helical conductor (118) is composed of a plurality of wires with each wire connected to each pin (116). The annular electrode (111) and the pins are disposed in the same direction away from the interior of the conducting cylinder.</p>
申请公布号 WO1997012372(A1) 申请公布日期 1997.04.03
申请号 US1996015474 申请日期 1996.09.24
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