发明名称 FLEXIBLE CONTINUOUS CATHODE CONTACT CIRCUIT FOR ELECTROLYTIC PLATING OF C4, TAB MICROBUMPS, AND ULTRA LARGE SCALE INTERCONNECTS
摘要 A cathode contact device (20) is provided for providing deposition onto a target surface (18) of a workpiece (16). The workpiece has a first electrically conductive continuous contact (17) surrounding the target surface (18). The cathode contact device (20) includes a second electrically conductive continuous contact adapted for frictionally contacting the first contact (17) along a continuous path located on the first contact (17). The second contact further has an inner periphery defining an aperture for passing therethrough the particles onto the target surface (18). Additionally, the cathode contact device (20) includes a circuit for electrically coupling the second contact to an electrical current supply (25).
申请公布号 WO9712079(A1) 申请公布日期 1997.04.03
申请号 WO1996US15032 申请日期 1996.09.19
申请人 INTEL CORPORATION;CRAFTS, DOUGLAS, E.;SWAIN, STEVEN, M.;TAKAHASHI, KENJI;ISHIDA, HIROFUMI 发明人 CRAFTS, DOUGLAS, E.;SWAIN, STEVEN, M.;TAKAHASHI, KENJI;ISHIDA, HIROFUMI
分类号 C25D5/02;C25D7/12;C25D17/06;H01L21/60;(IPC1-7):C25D5/02 主分类号 C25D5/02
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