发明名称 WORK POSITION DETECTING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To inexpensively detect a position at high speed with high accuracy. SOLUTION: A laser beam source 3 is arranged on one side of a position in which a positioning hole 2 of a work 1 is normally positioned, and a two-dimensional position detecting element 4 is arranged on the other side so as to be opposed to the laser beam source 3, and a spotlight 7 passing through the positioning hole 2 of the laser beam source 3 is received by the two-dimensional position detecting element 4, and operation processing is performed on four photoelectric currents Ix1 , Ix2 , Iy1 and Iy2 generated by the two dimensional position detecting element 4 by an operation circuit 12, and a dislocation quantity of the positioning hole 2 is calculated.</p>
申请公布号 JPH0979815(A) 申请公布日期 1997.03.28
申请号 JP19950259509 申请日期 1995.09.13
申请人 SHINKAWA LTD 发明人 AOYANAGI NOBUYUKI
分类号 G01B11/00;H01L21/60;(IPC1-7):G01B11/00 主分类号 G01B11/00
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