SEMICONDUCTOR ACCELERATION SENSOR AND FABRICATION THEREOF

摘要

PROBLEM TO BE SOLVED: To obtain a semiconductor acceleration sensor, and a fabrication method thereof, in which the alignment of a weight is facilitated and further the weight can be formed easily in the center. SOLUTION: The semiconductor acceleration sensor comprises a fixed part 1A, an acting part 1B bonded with a weight 3A and applied with a force by acceleration, and a flexible part 1C connecting the fixed part 1A and the acting part 1B and a piezoelectric resistive element is formed thereon. The weight 3A is formed by welding a metal body of low melting point onto a thin metal 2 provided at a predetermined position of acting part 1B.