SUBSTRATE PROCESSING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To enable necessary and sufficient liquid draining through a small simple constitution by branching a tip to provide an upstream-side gas outlet that opens toward a processing bath on the upstream side and a downstream- side gas outlet that opens toward a processing bath on the downstream side. SOLUTION: An air knife 40 is formed at the upper edge of an opening 13a formed in a partitioning wall 13 that separates a processing bath 2 on the upstream side from a processing bath 3 on the downstream side. Further, an upstream-side gas outlet 43a and a downstream-side gas outlet 44a are so constituted that band-shaped air streams jetted from the gas outlets will traverse a substrate B transported to the opening 13a. When the substrate B goes by the opening 13a, an air stream from the upstream-side gas outlet 43a going toward the upstream side and an air stream from the downstream-side gas outlet 44a going toward the downstream side form an interfacial area where upstream-side processing liquid X and downstream-side processing liquid Y will not be mixed together, on the substrate direct under the air knife 40.