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发明名称
Cyklische Carbonatverbindung, Verfahren zu ihrer Herstellung und diese enthaltende positive-arbeitende Photoresistzusammensetzung
摘要
申请公布号
DE69303973(T2)
申请公布日期
1997.03.27
申请号
DE1993603973T
申请日期
1993.04.08
申请人
SUMITOMO CHEMICAL CO., LTD., OSAKA, JP
发明人
UEDA, YUJI, IZUMI-SHI, JP;TAKEYAMA, NAOKI, SETTSU-SHI, JP;UEKI, HIROMI, SHIMAMOTOCHO, MISHIMA-GUN, JP;KUSUMOTO, TAKEHIRO, TAKARAZUKA-SHI, JP
分类号
C07C68/06;C07C69/96;G03F7/004;G03F7/039;H01L21/027;(IPC1-7):C07C69/96
主分类号
C07C68/06
代理机构
代理人
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