| 摘要 |
The device for removing particulate debris with static electricity on the electronic parts has a cleaning chamber(8) and an activated air generating system(1). The cleaning chamber has an air inlet(11a), an air outlet(12a) and a conveyor system(20) with a heater(21) for transporting the electronic parts(M). The activated air generating system is combined with a centrifugal force generating device(2) and an air-water separator(4). Thee centrifugal force generating device has the functions off ion dissociation, water vapor activation and ionization of vapor molecule.
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