VIBRATION-PROOF AND VIBRATION-ISOLATION CARRIAGE

摘要

PROBLEM TO BE SOLVED: To provide a wheel with vibration isolation in a vibration-proof carriage. SOLUTION: In a vibration-proof and vibration-isolation carriage, a wheel with vibration isolation is provided on a carriage having a vibration-proof mounting plate against vertical and horizontal vibration. The wheel has a roller 1 in a vibration dumping resonance system with coaxial double structure made up of an air-sealed cylindrical body including a surge tank 5 on the axial side and a surge tank 5 on the outer circumferential side and an air spring 6 joined continuously with an orifice 7. The vibration to the wheel can be reduced by selecting a vibration frequency of the wheel when the wheel is carried through a lattice-shaped uneven floor in a clean room in a way that the vibration frequency is different from the resonance frequency in the resonance system.