发明名称 Wafer container
摘要 An integrated circuit wafer protective container for containing IC wafers during the process of IC wafer fabrication is disclosed. The protective container comprises a wafer-containing member and a wafer-protecting and securing member. The wafer-containing member is of a substantially cylindrical shape of a tube having a closed end and an open end. The inner diameter of the wafer-containing member is suitable for containing the IC wafers. The wafer-protecting and securing member is of a substantially cylindrical shape of a tube having a closed end and open end. The inner diameter of the wafer-protecting and securing member is suitable for receiving the cylindrical body of the wafer-containing member. The wafer-protecting and securing member has a number of latching protrusions formed at its open end on the inner side wall of its cylindrical shaped tube. The wafer-containing member has a number of latching slots formed at its closed end on the exterior surface of its cylindrical shaped tube. Each of the latching protrusions mates with a corresponding one of latching slots when the cylindrical body of the wafer-containing member is fully received inside the wafer-protecting and securing member. A wafer confinement member secures a stack of IC wafers stored in the wafer containing member.
申请公布号 US5611448(A) 申请公布日期 1997.03.18
申请号 US19950533661 申请日期 1995.09.25
申请人 UNITED MICROELECTRONICS CORPORATION 发明人 CHEN, FU-LIANG
分类号 H01L21/673;(IPC1-7):B65D85/00 主分类号 H01L21/673
代理机构 代理人
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