| 摘要 |
PROBLEM TO BE SOLVED: To provide a holder drive which, using a small-capacity motor that rotates at a constant speed, can mechanically scan an oscillating-arm-mounted holder in such a way that its velocity component in Y direction is constant. SOLUTION: This holder drive 30 converts the rotation of a drive motor by means of a ball screw 38 and a ball nut 40 into the rectilinear movement of a slider 44, which is in turn converted by a connecting mechanism 50 into the oscillating rotation of a drive arm 36, with the oscillating rotation subsequently oscillating and rotating an oscillating arm 12 mounted on the same arm shaft 32 as the drive arm 36. A holder 8 for holding a wafer 6 is mounted near the end of the oscillating arm 12. |
