MANUFACTURING METHOD OF OPTICAL PATH REGULATING APPARATUS

摘要

The method for aligning actuators and mirrors by themselves includes steps; a) forming M X N signal electrodes and M+1 common ground electrodes at which certain part of row of each signal electrode is superimposed on certain part of two common ground electrodes; b) forming grooves connected to row of common ground electrodes after spraying photo resistor on the common ground electrode; c) forming driving means attached on the grooves; d) removing the photo resistor after forming mirrors at surface of the driving means; and e) connecting grounded line pattern to the common ground electrodes with metal wire.