发明名称 |
Electron microscope specimen supports |
摘要 |
A specimen support for use in an electron microscope comprises a deposited diamond film. The film is deposited on a substrate using a plasma assisted chemical vapour deposition process and then machined to a desired configuration using a laser machining process. Molybdenum, tungsten or silicon are used as substrates. |
申请公布号 |
EP0762466(A1) |
申请公布日期 |
1997.03.12 |
申请号 |
EP19960306235 |
申请日期 |
1996.08.28 |
申请人 |
GEC-MARCONI LIMITED |
发明人 |
AUGUSTUS, PETER DAVID;AHMED, MUHAMMED MASOOD |
分类号 |
H01J37/20;H01J37/26 |
主分类号 |
H01J37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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