Improvements in or relating to micromechanical devices

摘要

An improved elastic member (24) for micromechanical devices (12). The micromechanical device (12) includes a stationary member (28) and a moving member (26) which are connected together by a elastic member (24). Because of repeated and frequent movement of the moving member (26), the elastic member (24) can become permanently flexed or deformed, resulting in poor operation of the device. Nitrided aluminum and non-aluminum alloys can be used to form a metal film from which the elastic member (24) is formed, either as polycrystalline films or as amorphous films. These alloys have isotropic elastic properties, high tensile strength and form smooth films when deposited. <IMAGE>