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发明名称
摘要
申请公布号
JP2590741(B2)
申请公布日期
1997.03.12
申请号
JP19940165110
申请日期
1994.07.18
申请人
NIPPON ELECTRIC CO
发明人
KAMITO NORIAKI
分类号
G01K7/00;G01D21/00;G01K17/00;G01N25/00;G01N25/20;G01R31/00;G01R31/26;G01R31/28;G12B15/02;H01L23/467;(IPC1-7):G01K17/00
主分类号
G01K7/00
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代理人
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