发明名称 Werkwijze en apparaat voor het vervaardigen van een halfgeleider laserinrichting.
摘要 A method for producing a semiconductor laser device includes the steps of: forming a reflection protective film on a light-emitting facet of a semiconductor laser device; and removing an unwanted reflection protective film formed on a portion other than the light-emitting facet by an etching technique. Furthermore, an apparatus for producing a semiconductor laser device, includes: a formation section forming a reflection protective film on a light-emitting facet of a semiconductor laser device; an etching section removing an unwanted reflection protective film formed on a portion other than the light-emitting facet by an etching technique; a device inverting section turning the semiconductor laser device upside down; and a device transferring section transferring the semiconductor laser device among the formation section, the etching section, and the device inverting section in a predetermined order.
申请公布号 NL1003940(A1) 申请公布日期 1997.03.11
申请号 NL19961003940 申请日期 1996.09.02
申请人 SHARP KABUSHIKI KAISHA 发明人 YOSHIHISA FUJII
分类号 H01S5/00;H01S5/02;H01S5/028 主分类号 H01S5/00
代理机构 代理人
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