Thin film actuated mirror array for use in an optical projection system

摘要

An array of MxN thin film actuated mirrors comprises a switching matrix, an array of MxN pairs of supporting members, and an array of MxN actuating structures, wherein the active matrix includes a substrate and a first, a second and a third conduction line patterns printed on top thereof, and each of the actuating structures is provided with a pair of actuators and a pair of gate actuators. With the presence of the gate actuators in each of the actuating structures in conjunction with the first, the second and the third conduction line patterns on the switching matrix, it is possible to eliminate the use of transistors in the array of MxN thin film actuated mirrors.