| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspecting device capable of detecting a defect of a phase shifter and a light transmissible foreign matter. SOLUTION: This device has two differential interference microscopic systems of transmission type and reflection type. A polarizing beam splitter 14, for example, is used as the analyzer of the transmission type differential interference microscope, and the transmitted light ir1 and reflected light ir2 of the beam splitter 14 are detected to provide the differential output between them. In the reflection type one, the differential output is similarly provided. The relative intensity of the two signals is regulated. A defect is detected on the basis of the difference between the two signals after regulation. |
