| 摘要 |
PROBLEM TO BE SOLVED: To eliminate the influence of the magnetic field near a sample, and also eliminate the reduction in spatial resolution and distortion of spectrum to perform a highly precise analysis. SOLUTION: In the Auger electron spectroscope for emitting an accelerated electron to a sample 4 and spectrally dividing the Auger electron generated from the sample surface to analyze the sample surface, a magnetic filed cancel coil 10 for canceling the magnetic field appearing among an objective lens 2, the sample 4 and a spectroscope 5 is wound around the objective lens 2, around a magnet preventing cylinder 3 provided on the lower part of the objective lens 2, or around a magnetic shield for covering the spectroscope 5, and direct and alternating currents are made to flow thereto to control the magnetic field near the sample. A cancel magnetic field for removing the influence of the geomagnetic field appearing near the sample surface or an external floating magnetic field can be generated, and the bad effect by these magnetic fields can be effectively canceled. |
