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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0963994(A)
申请公布日期
1997.03.07
申请号
JP19950220170
申请日期
1995.08.29
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
MIURA KENJI
分类号
H01L21/301;H01L27/12;(IPC1-7):H01L21/301
主分类号
H01L21/301
代理机构
代理人
主权项
地址
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