DIFFERENTIAL INTERFERENCE MICROSCOPE, AND DEFECT INSPECTING DEVICE USING THE SAME,申请号JP19950217987-传众专利搜索

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发明名称	DIFFERENTIAL INTERFERENCE MICROSCOPE, AND DEFECT INSPECTING DEVICE USING THE SAME
摘要
申请公布号	JPH0961370(A)	申请公布日期	1997.03.07
申请号	JP19950217987	申请日期	1995.08.25
申请人	NIKON CORP	发明人	HAGIWARA TSUNEYUKI
分类号	G01N21/88;G01N21/956;G02B21/00;G02B23/00;(IPC1-7):G01N21/88	主分类号	G01N21/88
代理机构		代理人
主权项
地址

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