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经营范围
发明名称
Verfahren und Apparat zur Wiederstandsmessung in Halbleiterelementen
摘要
申请公布号
DE69122681(T2)
申请公布日期
1997.03.06
申请号
DE1991622681T
申请日期
1991.07.09
申请人
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM VZW, LEUVEN-HEVERLEE, BE
发明人
VANDERVORST, WILFRIED, B-2800 MECHELEN, BE;MEURIS, MARC, B-3140 KEERBERGEN, BE
分类号
G01R27/02;G01R1/067;G01R27/00;G01R27/20;G01R31/26;H01L21/66;(IPC1-7):G01R27/02;G01R27/14
主分类号
G01R27/02
代理机构
代理人
主权项
地址
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