| 申请人 |
SHIN-ETSU HANDOTAI CO., LTD., TOKIO/TOKYO, JP |
发明人 |
OTOKAWA, TAKAO, C/O SEMICONDUCTOR RES., INS.OF, ANNAKA-SHI, GUNMA-KEN, JP;ISUDA, NOBUHIRO, C/O SEMICONDUCTOR RES., INS. OF, ANNAKA-SHI, GUNMA-KEN, JP;USHIO, SATOSHI, C/O SEMICONDUCTOR RES., INS. OF, ANNAKA-SHI, GUNMA-KEN, JP;TAKENAKA, TAKAO, C/O SEMICONDUCTOR RES., INS.OF, ANNAKA-SHI, GUNMA-KEN, JP |
