| 申请人 |
TOKYO ELECTRON LTD., TOKIO/TOKYO, JP;KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP |
发明人 |
HARADA, HIROMI, HIRATSUKA-SHI, KANAGAWA-KEN, JP;KUBOTA, SINJI, SAGAMIHARA-SHI, KANAGAWA-KEN, JP;KUMAGAI, HIROMI, SHINAGAWA-KU, TOKYO, JP;ARAMI, JUNICHI, SHINJUKU-KU, TOKYO, JP;HORIOKA, KEIJI, C/O INTELLECTUAL PROPERTY DIV., MINATO-KU, TOKYO 105, JP;HASEGAWA, ISAHIRO,C/O INTELLECTUAL PROPERTY DIV., MINATO-KU, TOKYO 105, JP;OKANO, HARUO,C/O INTELLECTUAL PROPERTY DIV, MINATO-KU, TOKYO 105, JP;OKUMURA, KATSUYA,C/O INTELLECTUAL PROPERTY DIV., MINATO-KU, TOKYO 105, JP;YOSHIDA, YUKIMASA,C/O INTELLECTUAL PROPERTY DIV., MINATO-KU, TOKYO 105, JP |
