| 摘要 |
PURPOSE:To obtain specific contact pressure between a probe and an electrode and to prevent the probe from sliding down from the electrode by providing the probe where a conductor connection part and a contact part to be run through a through-hole are integrally formed. CONSTITUTION:The card has a substrate 10 where a specific conductor 12 is printed, a nearly ring-shaped insulating holder 20 which is fitted in the opening 11 of the substrate 10, a conductor 52 corresponding to the electrode 61 of an IC chip 60 to be measured, and the through hole 51. Further, the card has a flexible film 50 fitted so as to block the insulating holder 20, the probe 30 where the connection part 32 connected to the conductor 52 and the contact part 31 run through the through-hole 51 are formed integratedly, having elastic insulating resin 70 charged in the insulating holder 20 blocked with the film 50, and a lead wire 80 which connects the conductor 52 and conductor 12. The contact part 32 of the probe 30 is brought into contact with the electrode 61 of an object 60 to be measured for overdriving to deform the resin 70, thereby increasing the contact pressure between the probe 30 and electrode 61. |
