| 摘要 |
PROBLEM TO BE SOLVED: To easily set an optimum feed pitch by setting a feed pitch in auxiliary scanning direction to be greater than a sampling pitch, performing thinning- scans, and making the feed pitch smaller according to image accuracy. SOLUTION: A variety of parameters such as scanning range are set using a control panel 22, and a sampling pitch and a thinning level (m) (1, 2...) in main scanning direction are automatically set 18. Next, a probe 11 is driven 12 to scan a plane on a subject 13 for inspection to perform measurement. In this initial scan, if the level (m) is 4, for example, a feed pitch in auxiliary scanning direction becomes 2<m-1> = 2<3> = eight times the sampling pitch, and then seven of main scanning lines are thinned 24 to form an initial image, which is then displayed 27. If the image does not meet a desired accuracy, the feed pitch is set to be smaller than the initial one, and the thinned scanning lines are scanned for measurement so as to form and display the next image. Thereafter, the feed pitch is made smaller until the image meets the desired accuracy, and the next scan and image display are repeated to set an optimum feed pitch. |
