IONIZATION TYPE HIGH-VACUUM AUXILIARY PUMP,申请号JP19950205710-传众专利搜索

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发明名称	IONIZATION TYPE HIGH-VACUUM AUXILIARY PUMP
摘要
申请公布号	JPH0955183(A)	申请公布日期	1997.02.25
申请号	JP19950205710	申请日期	1995.08.11
申请人	FUJITSU LTD	发明人	SATO TAKAYUKI;KUSAKA KATSUHIRO
分类号	H01J41/14;(IPC1-7):H01J41/14	主分类号	H01J41/14
代理机构		代理人
主权项
地址

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