发明名称 SOURCES USED IN MOLECULAR BEAM EPITAXY
摘要 A source for Molecular Beam Epitaxy (MBE) including an open-ended crucible and a removable orificed cover plate for covering the open end of the crucible, the cover plate having an encapsulated heater, preferably of Pyrolytic Graphite, which reduces orifice blockage.
申请公布号 WO9706292(A1) 申请公布日期 1997.02.20
申请号 WO1996GB01882 申请日期 1996.08.02
申请人 THERMO INSTRUMENT SYSTEMS INC.;POOLE, DAVID, CHARLES 发明人 POOLE, DAVID, CHARLES
分类号 C30B23/06 主分类号 C30B23/06
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