An optical scatterometer system enables ilumination of a sample material (120) at various angles of incidence with beams (100) without rotating or otherwise moving the sample material (120).
申请公布号
WO9706407(A1)
申请公布日期
1997.02.20
申请号
WO1996US12513
申请日期
1996.07.31
申请人
MCNEIL, JOHN, R.;NAQVI, S., SOHAIL, H.;WILSON, SCOTT, R.
发明人
MCNEIL, JOHN, R.;NAQVI, S., SOHAIL, H.;WILSON, SCOTT, R.
