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发明名称
Integrated circuit fabrication method.
摘要
申请公布号
EP0602841(A3)
申请公布日期
1997.02.19
申请号
EP19930309639
申请日期
1993.12.02
申请人
AT&T CORP.
发明人
NANDA, ARUN KUMAR;SUNDAHL, MARK JOSEPH;VAJDA, EDWARD JOSEPH
分类号
G03F7/11;H01L21/027;(IPC1-7):G03F7/00;C23C16/50
主分类号
G03F7/11
代理机构
代理人
主权项
地址
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