SILICON NITRIDE POWDER AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To obtain a silicon nitride powder stably, without fouling the inside of a heating furnace for a reaction, without existing oxides or oxynitrides on its surface and high in purity and α-forming ratio. SOLUTION: This silicon nitride powder having >=96% α-forming rate and <=0.4wt.% metallic impurity, is obtained by heating a metallic silicon powder containing oxygen with an aluminum oxide powder presenting without a contact thereto under a nitriding atmosphere.