Method for supplying a polishing liquid and polishing method using the same

摘要

The invention provides a novel method of supplying a polishing liquid onto a surface of a polishing pad with which a surface of a film is polished wherein a solution including an aggregation agent and a slurry into which fine polishing particles were already dispersed are separately supplied onto the polishing surface so that the slurry is mixed with the solution to thereby cause an aggregation of the fine polishing particles to form aggregated particles to be used for polishing.