| 摘要 |
PROBLEM TO BE SOLVED: To provide structure which can restore the temperature of each test tray and IC to a room temperature after test finished with simple structure, in the case of an IC test device which gives low temperature to a tested IC and tests the IC that is given with low temperature. SOLUTION: Heaters 35 are furnished to members constituting a vertically conveying device to be provided in a heat-removing tank 103 or test tray support stands to mount test trays TST discharged from a test chamber, and heat to be generated from the heaters 35 is transmitted directly to the test trays TST, and the temperature of each IC is returned to a room temperature efficiently even if the temperature in the heat-removing tank 103 is low, and dew formation is prevented. |
