发明名称 Microbolometer detector element with enhanced sensitivity
摘要 A microbolometer detector element includes an optically absorptive material structure that absorbs a portion of incident radiation, and has a plurality of openings that diffract other portions of the incident radiation. The absorptive structure has an electrical resistivity that varies as a function of its temperature. An optical radiation director re-directs the diffracted optical radiation back to the absorptive structure. The distance between the radiation director and the absorptive structure is tuned so that, for a predetermined design wavelength, optical radiation that is re-directed back to the absorptive structure constructively interferes with incident optical radiation that is not reflected by the absorptive structure. The constructive interference causes the absorptive structure to absorb substantially more optical radiation at the design wavelength than at other wavelengths. The re-directed radiation also destructively interferes with incident optical radiation that is reflected by the absorptive structure, thereby suppressing reflection of radiation. A circuit is connected to the absorptive structure to measure its electrical resistivity.
申请公布号 US5602393(A) 申请公布日期 1997.02.11
申请号 US19950479917 申请日期 1995.06.07
申请人 HUGHES AIRCRAFT COMPANY 发明人 GERARD, HENRY M.
分类号 G01J5/20;(IPC1-7):G01J5/02 主分类号 G01J5/20
代理机构 代理人
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