| 摘要 |
PROBLEM TO BE SOLVED: To facilitate the improvement of characteristics of an electrode by selecting electrode materials under relieved restrictions. SOLUTION: A conductive film 11a formed of a 1st electrode material is filmed on the surface of a piezoelectric body WE, then a lift-off mask 61 in the negative pattern of an electrode pattern is provided on the conductive film 11a, and the exposed surface of the conductive film 11a is coated with a thin film 12a of a 2nd electrode material. Then the lift-off mask 61 is removed, an etching mask 62 in the positive pattern corresponding to the electrode pattern is provided overlapping with a thin film 12a of a 2nd electrode material, and the conductive film 11a is pattern in the electrode pattern by an anisotropic etching method. |
