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发明名称
METHOD AND APPARATUS FOR SPECIFICATION OF FAILURE MODE
摘要
申请公布号
JPH0933604(A)
申请公布日期
1997.02.07
申请号
JP19950186973
申请日期
1995.07.24
申请人
NEC CORP
发明人
SANADA KATSU
分类号
G01R31/26;G01R31/317;G01R31/319;H01L21/66;H01L21/8234;H01L27/088;H03K19/00;H03K19/0948;(IPC1-7):G01R31/26;H03K19/094
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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