| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a positioning method and device which can accurately produce a deceleration table with least error. SOLUTION: In an acceleration area where a movement object is moved with acceleration, the distance L is calculated against the initial stationary position of a stage 15 based on the velocity data and time data on the stage 15. Then the data on the distance L and the velocity data are written into a deceleration table which shows the relation between the velocity and the distance.</p> |
