DEVELOPER FOR COLOR FILTER RESIST

摘要

PROBLEM TO BE SOLVED: To obtain a developer usable in a wide range of exposure and condition in development, ensuring easy setting of conditions and not causing problem due to foaming at the time of development. SOLUTION: This developer contains an inorg. alkali agent and a nonionic surfactant having a polyoxyalkylene ether group. By the combination of the inorg. alkali agent with the nonionic surfactant, the degree of freedom of exposure and that of conditions in development are enhanced and foaming at the time of development can be suppressed.