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经营范围
发明名称
ELECTRON BEAM PROBER
摘要
申请公布号
JPH0933616(A)
申请公布日期
1997.02.07
申请号
JP19950187262
申请日期
1995.07.24
申请人
MITSUBISHI ELECTRIC CORP
发明人
ISHII TATSUYA
分类号
G01R31/302;H01L21/66;(IPC1-7):G01R31/302
主分类号
G01R31/302
代理机构
代理人
主权项
地址
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