Laserbearbeitungsverfahren und Laserbearbeitungsvorrichtung
摘要
<p>In a laser processing method and a laser processing apparatus for projecting a laser beam to a work so as to process this work, an irradiated shape of the laser beam is defined in such a manner that a desirable processing region of the work is irradiated by the laser beam, and also a power density distribution of the laser beam is defined in such a manner that power density suitable for processing each portion of the work is given to each portion of the work within the desirable processing region. <IMAGE></p>
