Static pressure table device with a tapered surface

摘要

In a static pressure table device wherein an annular recess is formed in one of confronting surfaces of a stationary bed and a rotary table thereon, and static pressure oil is supplied to the recess for rotatingly support the table on the bed, a static pressure gap formed between the confronting surfaces of the bed and table is constructed to gradually or stepwisely increase toward the outer periphery of the device. As a result, the viscosity resistance of the pressure oil is decreased toward the outer periphery and heat generation is reduced in the outer peripheral region, whereby a uniform temperature distribution of the table becomes possible with resultant reduced thermal deformation of the table so that the table can be rotated at high speed.